Journal of Vacuum Science & Technology B Posted on September 26, 2011 by Men Yali Journal Title: Journal of Vacuum Science & Technology B ISSN: (printed) 1071-1023 (online) 1520-8567 Abbreviation: J. Vac. Sci. Tech. B Remarks: Previously known as: Journal of Vacuum Science and Technology (prior to 1983) Copyright Holder: American Vacuum Society