Journal of Micro/Nanolithography, MEMS, and MOEMS Posted on January 28, 2014 by SCG DR Journal Title: Journal of Micro/Nanolithography, MEMS, and MOEMS ISSN: 1932-5150 (printed) 1932-5134 (online) Abbreviation: Journal of Micro/Nanolithography, MEMS, and MOEMS Copyright Holder: Society of Photo-optical Instrumentation Engineers (SPIE)
