Proceedings of SPIE – Optical Micro- and Nanometrology Posted on July 18, 2012 by SCG DR Proceedings Title Copyright owner Optical Micro- and Nanometrology in Manufacturing Technology (Volume 5458) SPIE Optical Micro- and Nanometrology in Microsystems Technology (Volume 6188, ISBN: 9780819462442) SPIE Optical Micro- and Nanometrology in Microsystems Technology II (Volume 6995, ISBN: 9780819471932) SPIE Optical Micro- and Nanometrology III (Volume 7718, ISBN: 9780819481917) SPIE Optical Micro- and Nanometrology IV (Volume 8430, ISBN: 9780819491220) SPIE
